Titanium round target
China Grade:TA1,TA2,TA3,TA9,TA10,TC4,TC11.
America Grade:TA1,TA2,TA3,TA9,TA10,TC4,TC11.
China Standard:GB/T 16598,GB/T2965.
America Standard:ASTM F2113,ASTM F1512.
Processing technology: forging, rolling.
Surface: vehicle light, chamfer, clean and smooth surface, no peeling, pores, cracks and other defects.
Specification: φ100×40,φ98×40,φ95×45,φ90×40,φ85×35,φ65×40.
Chemical composition:
Grade | N | C | H | Fe | O | Al | V | Pb | Mo | Ni | Ti |
TA1/Gr1 | 0.03 | 0.08 | 0.015 | 0.2 | 0.18 | / | / | / | / | / | Balance |
TA2/Gr2 | 0.03 | 0.08 | 0.015 | 0.3 | 0.25 | / | / | / | / | / | Balance |
TA3/Gr3 | 0.05 | 0.08 | 0.015 | 0.3 | 0.35 | / | / | / | / | / | Balance |
TA4/Gr4 | 0.05 | 0.08 | 0.015 | 0.50 | 0.40 | / | / | / | / | / | Balance |
TC4/Gr5 | 0.05 | 0.08 | 0.015 | 0.4 | 0.2 | 5.5-6.75 | 3.5-4.5 | / | / | / | Balance |
TA9/Gr7 | 0.03 | 0.08 | 0.015 | 0.3 | 0.25 | / | / | 0.12-0.25 | / | / | Balance |
TA18/Gr9 | 0.03 | 0.08 | 0.015 | 0.25 | 0.15 | 2.5-3.5 | 2.0-3.0 | / | / | / | Balance |
Main applications: suitable for sputtering coating, widely used in semiconductor chips, MEMS sensors, photoelectric devices, wide forbidden band semiconductor, graphene and other industry fields.